| Author: | ISBN: | 9781118621189 | |
| Publisher: | Wiley | Publication: | March 4, 2013 |
| Imprint: | Wiley-ISTE | Language: | English |
| Author: | |
| ISBN: | 9781118621189 |
| Publisher: | Wiley |
| Publication: | March 4, 2013 |
| Imprint: | Wiley-ISTE |
| Language: | English |
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.
This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.
This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
