Transmission Electron Microscopy in Micro-nanoelectronics

Nonfiction, Science & Nature, Technology, Electronics, Microelectronics
Cover of the book Transmission Electron Microscopy in Micro-nanoelectronics by Alain Claverie, Wiley
View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart
Author: Alain Claverie ISBN: 9781118579053
Publisher: Wiley Publication: January 29, 2013
Imprint: Wiley-ISTE Language: English
Author: Alain Claverie
ISBN: 9781118579053
Publisher: Wiley
Publication: January 29, 2013
Imprint: Wiley-ISTE
Language: English

Today, the availability of bright and highly coherent electron sources and sensitive detectors has radically changed the type and quality of the information which can be obtained by transmission electron microscopy (TEM). TEMs are now present in large numbers not only in academia, but also in industrial research centers and fabs.
This book presents in a simple and practical way the new quantitative techniques based on TEM which have recently been invented or developed to address most of the main challenging issues scientists and process engineers have to face to develop or optimize semiconductor layers and devices. Several of these techniques are based on electron holography; others take advantage of the possibility of focusing intense beams within nanoprobes. Strain measurements and mappings, dopant activation and segregation, interfacial reactions at the nanoscale, defect identification and specimen preparation by FIB are among the topics presented in this book. After a brief presentation of the underlying theory, each technique is illustrated through examples from the lab or fab.

View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart

Today, the availability of bright and highly coherent electron sources and sensitive detectors has radically changed the type and quality of the information which can be obtained by transmission electron microscopy (TEM). TEMs are now present in large numbers not only in academia, but also in industrial research centers and fabs.
This book presents in a simple and practical way the new quantitative techniques based on TEM which have recently been invented or developed to address most of the main challenging issues scientists and process engineers have to face to develop or optimize semiconductor layers and devices. Several of these techniques are based on electron holography; others take advantage of the possibility of focusing intense beams within nanoprobes. Strain measurements and mappings, dopant activation and segregation, interfacial reactions at the nanoscale, defect identification and specimen preparation by FIB are among the topics presented in this book. After a brief presentation of the underlying theory, each technique is illustrated through examples from the lab or fab.

More books from Wiley

Cover of the book Aerosol Measurement by Alain Claverie
Cover of the book Introduction to Computational Chemistry by Alain Claverie
Cover of the book Interpretation of Organic Spectra by Alain Claverie
Cover of the book Traditional Herbal Medicine Research Methods by Alain Claverie
Cover of the book Characteristic Modes by Alain Claverie
Cover of the book Large-Scale Inverse Problems and Quantification of Uncertainty by Alain Claverie
Cover of the book Brain Stimulation by Alain Claverie
Cover of the book Bioanalysis of Pharmaceuticals by Alain Claverie
Cover of the book Educational Neuroscience by Alain Claverie
Cover of the book The Zen of Fundraising by Alain Claverie
Cover of the book PIPEs by Alain Claverie
Cover of the book Das Little Black Book der Salate und Dressings by Alain Claverie
Cover of the book Executive Coaching by Alain Claverie
Cover of the book Bridge For Dummies by Alain Claverie
Cover of the book Pathology for Toxicologists by Alain Claverie
We use our own "cookies" and third party cookies to improve services and to see statistical information. By using this website, you agree to our Privacy Policy