Comparative Study of the Capabilities of Various Micromachining Processes

Master's Thesis from the year 2002 in the subject Engineering - Mechanical Engineering, grade: 1.0 (A), University of Illinois at Chicago (Department of Mechanical Engineering), 230 entries in the bibliography, language: English, abstract: Introduction 1.1 Background and Motivation There has been a significant increase in the importance of miniature parts in recent years. The forerunner of this technology was mostly the electronics industry with their need of manufacturing processes for electronic components, like printed circuit boards and integrated circuits. The market of microsystem technologies is in general a very fast growing market. According to a study of the European NEXUS organization (Network of Excellence in Multifunctional Microsystems), the worldwide market for microsystem technologies is growing at an average rate of 18% a year to a total of $38 billion in 2002. However, the focus of the development is distributed different in certain countries. While the US has for example a focus on parts for micro-electro-mechanical systems (MEMS), equipment for information technology, biomedicine and genetic engineering, Germany dominates in sensor technology for the automotive industry. Japan has traditionally a strong position in fine mechanics and precision engineering as well as in equipment for information technology and consumer goods. Until recently, the production of miniature components was focused on technologies, traditionally used in the electronics and semiconductor industry, like etching and other photofabrication techniques. Using these technologies extremely small feature sizes can be produced. Optical lithography for example produces features as small as 0.18 um and X-ray lithography can be used to produce even smaller features. Table 1.1 gives an overview of some of the methods which can be used for the production of miniature parts. An introduction to these techniques is given in some papers which brie y summarize different micromachining methods. A very good paper was published by Masuzawa. The most complete description of different processes is included in the book 'Fundamentals of microfabrication: the science of miniaturization' by Marc J. Madou. Some other papers summarizing different micromachining methods are for example. [...]