ULSI Front-End Technology

Covering from the First Semiconductor Paper to CMOS FINFET Technology

The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for analog CMOS has been included in this book.

Contents:

• Preface
• Author Biography
• Introduction to the History of Semiconductors
• History of MOS Technology
• CMOS Switching Speed Characterization and An Overview Regarding How to Speed Up CMOS
• Low Power CMOS Engineering
• Analog CMOS Technology
• Index

Readership: The book is useful for researchers in semiconductor technology especially practicing engineers.
Key Features:

• The book is readable for beginners
• The book is useful for semiconductor technology historians
• The book is useful for practicing engineers