Rapid Thermal Processing

Science and Technology

Nonfiction, Science & Nature, Technology, Material Science, Manufacturing
Cover of the book Rapid Thermal Processing by , Elsevier Science
View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart
Author: ISBN: 9780323139809
Publisher: Elsevier Science Publication: December 2, 2012
Imprint: Academic Press Language: English
Author:
ISBN: 9780323139809
Publisher: Elsevier Science
Publication: December 2, 2012
Imprint: Academic Press
Language: English

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

More books from Elsevier Science

Cover of the book Handbook of Supportive and Palliative Radiation Oncology by
Cover of the book Nonviral Vectors for Gene Therapy by
Cover of the book International Review of Cell and Molecular Biology by
Cover of the book Understanding and Mitigating Ageing in Nuclear Power Plants by
Cover of the book Handbook of Technical Textiles by
Cover of the book Introduction to Homeland Security by
Cover of the book Markov Chains by
Cover of the book Cracks and Fracture by
Cover of the book Field Guide to Appropriate Technology by
Cover of the book Thermal and Rheological Measurement Techniques for Nanomaterials Characterization by
Cover of the book Emerging Nanotechnologies in Rechargeable Energy Storage Systems by
Cover of the book International Review of Cell and Molecular Biology by
Cover of the book Advances in Marine Biology by
Cover of the book Viscoelasticity and Rheology by
Cover of the book Novel Fire Retardant Polymers and Composite Materials by
We use our own "cookies" and third party cookies to improve services and to see statistical information. By using this website, you agree to our Privacy Policy