Optical Materials
Microstructuring Surfaces with Off-Electrode Plasma
Nonfiction, Science & Nature, Technology, Lasers, Material Science, Science, Physics, General Physics
| Author: | Nikolay L. Kazanskiy, Vsevolod A. Kolpakov | ISBN: | 9781315279916 |
| Publisher: | CRC Press | Publication: | March 31, 2017 |
| Imprint: | CRC Press | Language: | English |
| Author: | Nikolay L. Kazanskiy, Vsevolod A. Kolpakov |
| ISBN: | 9781315279916 |
| Publisher: | CRC Press |
| Publication: | March 31, 2017 |
| Imprint: | CRC Press |
| Language: | English |
This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.
This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.
