Micro and Nano Fabrication
Tools and Processes
Nonfiction, Science & Nature, Technology, Nanotechnology, Manufacturing
| Author: | Hans H. Gatzen, Volker Saile, Jürg Leuthold | ISBN: | 9783662443958 |
| Publisher: | Springer Berlin Heidelberg | Publication: | January 2, 2015 |
| Imprint: | Springer | Language: | English |
| Author: | Hans H. Gatzen, Volker Saile, Jürg Leuthold |
| ISBN: | 9783662443958 |
| Publisher: | Springer Berlin Heidelberg |
| Publication: | January 2, 2015 |
| Imprint: | Springer |
| Language: | English |
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
