Introduction to Microsystem Design

Nonfiction, Science & Nature, Technology, Nanotechnology, Material Science
Cover of the book Introduction to Microsystem Design by Werner Karl Schomburg, Springer Berlin Heidelberg
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Author: Werner Karl Schomburg ISBN: 9783642194894
Publisher: Springer Berlin Heidelberg Publication: May 30, 2011
Imprint: Springer Language: English
Author: Werner Karl Schomburg
ISBN: 9783642194894
Publisher: Springer Berlin Heidelberg
Publication: May 30, 2011
Imprint: Springer
Language: English

The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.

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The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.

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