Petr Klapetek: 2 books

Accurate measurement at the nano-scale – nanometrology – is a critical tool for advanced nanotechnology applications, where exact quantities and engineering precision are beyond the capabilities of traditional measuring techniques and instruments. Scanning Probe Microscopy (SPM) builds up a picture...

Quantitative Data Processing in Scanning Probe Microscopy: SPM Applications for Nanometrology, Second Edition describes the recommended practices for measurements and data processing for various SPM techniques, also discussing associated numerical techniques and recommendations for further reading...