Growth, Processing, Characterization, and Devices
by
Paul H. Holloway, Gary E. McGuire
Language: English
Release Date: December 31, 1996
This book reviews the recent advances and current technologies used to produce microelectronic and optoelectronic devices from compound semiconductors. It provides a complete overview of the technologies necessary to grow bulk single-crystal substrates, grow hetero-or homoepitaxial films, and process advanced devices such as HBT's, QW diode lasers, etc.