Thin Film Materials Technology

Sputtering of Compound Materials

Nonfiction, Science & Nature, Technology, Metallurgy, Material Science
Cover of the book Thin Film Materials Technology by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi, Elsevier Science
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Author: Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi ISBN: 9780815519317
Publisher: Elsevier Science Publication: May 10, 2004
Imprint: William Andrew Language: English
Author: Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi
ISBN: 9780815519317
Publisher: Elsevier Science
Publication: May 10, 2004
Imprint: William Andrew
Language: English

An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.

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An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.

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