Kiyotaka Wasa: 2 books
Handbook of Sputter Deposition Technology
Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS
Language: English
Release Date: December 31, 2012
This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials,...
Thin Film Materials Technology
Sputtering of Compound Materials
Language: English
Release Date: May 10, 2004
An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology...