Silicon Technologies
Ion Implantation and Thermal Treatment
Nonfiction, Science & Nature, Technology, Electronics, Microelectronics
| Author: | ISBN: | 9781118601143 | |
| Publisher: | Wiley | Publication: | May 10, 2013 |
| Imprint: | Wiley-ISTE | Language: | English |
| Author: | |
| ISBN: | 9781118601143 |
| Publisher: | Wiley |
| Publication: | May 10, 2013 |
| Imprint: | Wiley-ISTE |
| Language: | English |
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.
