Resonant MEMS

Fundamentals, Implementation, and Application

Nonfiction, Science & Nature, Technology, Electronics, Microelectronics
Cover of the book Resonant MEMS by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink, Wiley
View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart
Author: Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink ISBN: 9783527676354
Publisher: Wiley Publication: April 22, 2015
Imprint: Wiley-VCH Language: English
Author: Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
ISBN: 9783527676354
Publisher: Wiley
Publication: April 22, 2015
Imprint: Wiley-VCH
Language: English

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

View on Amazon View on AbeBooks View on Kobo View on B.Depository View on eBay View on Walmart

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

More books from Wiley

Cover of the book Samsung Galaxy Tab 10.1 For Dummies by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book Obstetrics and Gynaecology by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book Building Your Own Robots by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book The GDA Diet by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book Introduction to Probability by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book Latent Class and Latent Transition Analysis by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book Alts Democratized by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book German Shepherds For Dummies by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book Collateral Damage by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book Make It Happen by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book The Mapping of Geological Structures by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book Game Design Essentials by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book Bioinspiration and Biomimicry in Chemistry by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book ABC of Pleural Diseases by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
Cover of the book How-to Manual for Pacemaker and ICD Devices by Christofer Hierold, Osamu Tabata, Gary K. Fedder, Jan G. Korvink
We use our own "cookies" and third party cookies to improve services and to see statistical information. By using this website, you agree to our Privacy Policy