Fabrication and Design of Resonant Microdevices

Nonfiction, Science & Nature, Technology, Technical & Manufacturing Industries & Trades, Electronics, Microelectronics
Cover of the book Fabrication and Design of Resonant Microdevices by Behraad Bahreyni, Elsevier Science
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Author: Behraad Bahreyni ISBN: 9780815519713
Publisher: Elsevier Science Publication: October 20, 2008
Imprint: William Andrew Language: English
Author: Behraad Bahreyni
ISBN: 9780815519713
Publisher: Elsevier Science
Publication: October 20, 2008
Imprint: William Andrew
Language: English

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry.

  • Offers numerous academic and industrial examples of resonant MEMS
  • Provides an analytic model of device behaviour
  • Explains two-port systems in detail
  • Devotes ample space to excitation and signal detection methods
  • Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices
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This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry.

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