W S Lau: 1 book
ULSI Front-End Technology
Covering from the First Semiconductor Paper to CMOS FINFET Technology
Language: English
Release Date: August 23, 2017
The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for...
