Pilar Gonzalez Ruiz: 1 book
by Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw
Language: English
Release Date: July 17, 2013
Language: English
Release Date: July 17, 2013
Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly-Si, allowing the direct post-processing on top of CMOS. This CMOS-MEMS monolithic integration can lead...
