Modeling of Film Deposition for Microelectronic Applications
by
Maurice H. Francombe, John L. Vossen
Language: English
Release Date: November 14, 1997
Significant progress has occurred during the last few years in device technologies and these are surveyed in this new volume. Included are Si/(Si-Ge) heterojunctions for high-speed integrated circuits, Schottky-barrier arrays in Si and Si-Ge alloys for infrared imaging, III-V quantum-well detector...