Bei Yu: 1 book
by Bei Yu, David Z. Pan
Language: English
Release Date: October 28, 2015
Language: English
Release Date: October 28, 2015
This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL). The authors describe in detail a set of algorithms/methodologies to resolve issues in modern design for manufacturability...
