Reactive Transport in PVD, CVD, and ALD
by
Angel Yanguas-Gil
Language: English
Release Date: November 30, 2016
This book will address the application of gas phase thin film methods, including techniques such as evaporation, sputtering, CVD, and ALD to the synthesis of materials on nanostructured and high aspect-ratio high surface area materials. We have chosen to introduce these topics and the different application...